Hot Carriers
The term
'hot carriers'
refers to either holes or electrons (also referred to as
'hot
electrons')
that have gained very high kinetic energy after being accelerated by a strong
electric field in areas of high field intensities within a semiconductor
(especially MOS) device. Because of their high kinetic energy, hot carriers can get injected and trapped in areas of the
device where they shouldn't be, forming a space charge that causes the
device to degrade or become unstable. The term
'hot carrier effects',
therefore, refers to device degradation or instability caused by hot
carrier injection.
According to
the 5th Edition Hitachi Semiconductor Device Reliability Handbook, there
are four (4) commonly encountered hot carrier injection mechanisms.
These are 1) the drain
avalanche hot carrier injection; 2) the channel hot electron injection; 3)
the substrate hot electron injection; and 4)
the
secondary generated hot electron injection.
The
drain
avalanche hot carrier (DAHC)
injection
is said to produce the worst device degradation under normal operating
temperature range. This occurs when a
high voltage
applied at the drain under non-saturated conditions (VD>VG) results in
very high
electric fields near the drain, which
accelerate channel carriers into the drain's depletion region. Studies
have shown that the worst effects occur when VD
= 2VG.
The
acceleration of the channel carriers causes them to collide with Si lattice atoms, creating dislodged
electron-hole pairs in the process. This phenomenon is known as
impact ionization,
with some of the displaced e-h pairs also gaining enough energy to
overcome the
electric potential barrier between the silicon substrate and the gate
oxide.
Under the influence
of drain-to-gate field, hot carriers
that surmount the substrate-gate oxide barrier get injected into the gate oxide layer where they are sometimes trapped. This hot
carrier injection process occurs mainly in a narrow injection zone at
the drain end of the device where the lateral field is at its maximum.
Hot carriers can be trapped at the Si-SiO2 interface (hence referred to
as 'interface states') or within the oxide itself, forming a
space charge (volume charge) that increases over time as more charges
are trapped. These trapped charges shift
some of the characteristics of the device, such as its
threshold
voltage
(Vth) and its
conveyed
conductance
(gm).

Figure 1.
DAHC injection involves impact
ionization of carriers near
the drain area; source: Hitachi
Semiconductor Reliability Handbook
Injected
carriers that do not get trapped in the gate oxide become
gate current.
On the other hand, majority of the holes from the e-h pairs generated by
impact ionization flow back to the substrate, comprising a large portion
of the
substrate's drift current.
Excessive substrate current may therefore be an indication of hot
carrier degradation. In
gross cases, abnormally high substrate current can upset the balance of carrier flow and facilitate
latch-up.
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See
Also:
Die Failures; Failure Analysis; Reliability Models
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