Physical Constants Related to Semiconductor Manufacturing

        

Constant

Symbol

SI-Unit

Definition/Value

Angstrom

 

10-10 m = 10-1 nm = 10-4 m

Atomic Mass

mu = 1u

kg

1.6605 x 10-27 kg

Avogadro's Constant

NA

mol-1

6.022 x 1023 mol-1

Bohr Radius

aB

 

0.529

Boltzmann Constant

k

J (deg K)-1

1.38066 x 10-23 J/deg K

Electron Rest Mass

me

kg

9.11 x 10-31 kg

Elementary Charge

q

coulomb (C)

1.60218 x 10-19 C

Electron Volt

eV

 

1.60218 x 10-19 J

= 23.053 kcal/mol

Molar Gas Constant

R

cal mol-1(deg K)-1

1.98719 cal mol-1 K-1

Permeability in Vacuum

o

Henry/cm

1.25663 x 10-8 H/cm

Permittivity in Vacuum

εo

Farad/cm

8.85418 x 10-14 F/cm

Planck Constant

h

J-s

6.62617 x 10-34 J-s

Reduced Planck Constant

= h/2π

ħ

J-s

1.05458 x 10-34 J-s

Proton Rest Mass

Mp

kg

1.67264 x 10-27 kg

Speed of Light in Vacuum

c

m/s

2.99792 x 108 m/s

Standard Atmospheric Pressure

 

Pa or N/m2

1.01325 x 105 Pa

Thermal Voltage at 300K

kT/q

V

0.0259 V

Wavelength of 1 eV quantum

λ

m

1.23977 m

            

        

      

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