![]() |
|||||||||||||||||||||||||||||||||||||||||||||||||||||||
|
|
|||||||||||||||||||||||||||||||||||||||||||||||||||||||
|
|||||||||||||||||||||||||||||||||||||||||||||||||||||||
|
<Back to Previous Page - Primary Elements
Used>
Other
Elements Used
Boron, symbol B, atomic number 5,
atomic group 13 or IIIA, atomic weight 10.81, is a hard, brittle,
semi-metallic element used as a dopant in semiconductor devices.
It is classified as an 'acceptor' when used as dopant for Si devices,
given that its atom has one less valence electron compared to the Si
atom that it replaces (B has 3 valence electrons while Si has 4).
This results in a vacancy of electron which is known as a 'hole'.
The resulting excess 'holes' make the material 'p-type.'
Germanium, symbol Ge, atomic number 32,
atomic group 14 or IVA, atomic weight 72.59, is a grayish white
semi-metallic element with a melting temperature of 958 deg C. It was
actually the original semiconductor material used to fabricate diodes
and transistors. However, the low band gap of Ge (0.66 eV) results in
relatively large leakage currents in its reverse-biased p-n junctions.
Lead,
symbol Pb, atomic number 82, atomic group 14 or IVA, atomic
weight 207.20, is one of the two major components of solder used in
finishing the external leads of the IC package. The other major
component of solder is Tin, or Sn.
Phosphorus, symbol P, atomic number 15,
atomic group 15 or VA, atomic weight 30.974, is a non-metallic element
used as a dopant in semiconductor devices. It is classified as a
'donor' when used as dopant for Si devices, given that its atom
'donates' or gives up one of its 5 valence electrons when it replaces a
Si atom, which only has 4 valence electrons. The resulting excess
electrons make the material 'n-type.'
Tin,
symbol Sn, atomic number 50, atomic group 14 or IVA, atomic
weight 118.69, is one of the two major components of solder used in
finishing the external leads of the IC package. The other major
component of solder is Lead, or Pb.
Alloy 42.
An alloy used for manufacturing leadframes, usually for ceramic packages
such as the CerDIP. It is composed of about 57.7% Fe, 41% Ni, 0.8%
Mn, and 0.5% Co. Its thermal coefficient of expansion is 4.3 ppm/deg
C.
Borophosposilicate Glass (BPSG).
A compound used as interlayer dielectric in integrated circuits for
isolating conductive lines and components from each other.
Gallium
Arsenide (GaAs).
A dark gray crystalline solid composed of gallium and arsenic used as
substrate semiconductor material for building integrated circuits.
GaAs has an energy gap of 1.35 eV, which is higher than the 1.11 eV of
Si. Energy gap is the amount of energy needed for an electron to
jump from the valence band into the conduction band. This is the
reason why GaAs devices can operate at higher temperatures than Si
devices - they are less prone to exhibit thermally-induced noise and
leakage.
Kovar. A
vacuum-melted, low-expansion alloy used for manufacturing leadframes,
usually for ceramic packages such as the CerDIP. It is composed of
about 53.48% Fe, 29% Ni, 17% Co, 0.2% Si, 0.3% Mn, and 0.02%C. It
melts at 1450 deg C, and has a resistivity of 490 microohm-mm.
Platinum
silicide (PtSi).
PtSi found a popular use in silicon integrated circuits as a highly
reliable contact metallization between the silicon substrate and the
upper metal layers. PtSi is formed using a self-aligned process,
making it very reproducible and resulting in a very clean
interface with silicon. A diffusion barrier metal such as Ti/Pt is often
deposited over the silicide before the final metal layer such as Al is
placed on top of the barrier metal..
Some Process Gases and Chemicals Used
in
Semiconductor Manufacturing
Acetic Acid
CH3COOH
Acetone
(CH3)2CO
Ammonium
Fluoride
NH4F
Ammonium
Hydroxide
NH4OH
Buffered
Oxide Etchant (BOE)
NH4F,
HF
Chrome
Etch
KMnO4,
Na3PO4
Chromium
Trioxide/HF/Water
CrO3,
HF, H2O
Chromium
Trioxide/HF/Water
CrO3,
HF, H2O
Chromium
Trioxide/Phos/Water
CrO3,
H3PO4, H2O
Glass
Etch
NH4F,
CH3COOH
Hydrochloric
Acid
HCl
Hydrofluoric
Acid
HF
Hydrogen
Peroxide
H2O2
Isopropyl
Alcohol
CH3CHOHCH3
M-Etch
HF,
HNO3, CH3COOH
Methyl
Alcohol
CH3OH
Methyl
Ethyl Ketone
CH3COCH2CH3
Nitric
Acid
HNO3
Phosphoric
Acid
H3PO4
Poly
Etch
HF,
HNO3, NH4F
Potassium
Hydroxide (Solution, Pellets)
KOH
Pre-Evap
Etch
NH4F,
(NH4)3PO4
Sodium
Hydroxide (Solution, Pellets)
NaOH
Sulfuric
Acid
H2SO4
Xylene
C6H4
Polysilicon.
Polycrystalline silicon, or polysilicon, is used in integrated circuits
as a conductor, resistor, or MOS gate metallization.
Sichrome (SiCr).
A compound used for
fabricating thin film resistors on an integrated circuit. SiCr
resistors are often trimmed to the final resistance values using a laser
beam after deposition.
Silicon
dioxide (SiO2).
Silicon dioxide is used mainly as an inter-layer dielectric to
electrically isolate conductive layers of the integrated cirucit
from each other. It is also used as a mask or capping layer.
Silicon dioxide may be deposited with dopants, in which case it may
serve purposes other than those mentioned above.
Silicon
nitride (Si3N4).
Silicon nitride is an amorphous dielectric often used as the topmost or
final passivating layer of an integrated circuit, mainly because it
offers excellent protection against corrosion and mechanical damage.
It's a good barrier against moisture and sodium diffusion, which is why
it is highly preventive of corrosion. It also has a high tensile
strength and resistivity.
Spin-On
Glass (SOG).
A glass compound deposited on the surface of a wafer for planarization
of the wafer.
Titanium
Tungsten (Ti/W).
A compound used as barrier metal under the Al metal line to prevent the
formation of Si nodules on the surface of the metal as a result of
interdiffusion between the Si and Al atoms. The TiW layer also
provides additional conduction for electricity.
<Back to Previous Page - Primary Elements Used>
Home
Copyright ©
2001-Present
www.SiliconFarEast.com.
All Rights Reserved. |
|||||||||||||||||||||||||||||||||||||||||||||||||||||||